Vias resistance information

To obtain information about the resistance of vias within a new process, you typically need access to the process design kit (PDK) provided by the semiconductor foundry or fabrication facility. Here’s a general guide on how you can retrieve via resistance information within a new process:

Consult Process Documentation

Start by reviewing the documentation provided in the process design kit (PDK) for the new process. This documentation should include details about the materials, layers, and dimensions used in the fabrication process, which can help you understand the properties of vias and their expected resistance.

Check PDK Documentation

Look specifically for information related to via resistance or via properties in the PDK documentation. This may include specifications such as via dimensions (width, height, aspect ratio), via material composition, and any resistance models provided by the foundry.

Use Design Tools

Utilize electronic design automation (EDA) tools or layout editors provided within the PDK to create test structures or dummy layouts that include vias. You can then perform simulations or extract parasitic parameters using the tools to estimate via resistance based on the layout and process parameters.

By following these steps and leveraging the resources provided in the process design kit (PDK), collaborating with foundry support, and conducting your own experiments and simulations, you can gather valuable information about via resistance within a new semiconductor process.